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The simultaneous suppression of phase shift error and harmonics in the phase shifting interferometry using carrier squeezing interferometry
Bo Li; Lei Chen; Xu C(徐晨); Jinpeng Li
2013-02-13
Source PublicationOptics Communications
Volume296Issue:296Pages:17–24
AbstractThe phase shift errors and the harmonics are the most common types of errors in the phase shifting interferometry. Although there are many suppression techniques for these two errors, it is hard to suppress them simultaneously. In this paper the carrier squeezing interferometry is used to solve this problem, where the data of phase shifting interferograms with linear carrier are re-arranged to acquire a spatial–temporal fringes image. In the frequency domain of the image the lobes of harmonics and phase shift errors and the lobe of the phase are separated, so the correct phase can be extracted by filtering. The algorithm is validated by both simulations and the experiments, with the phase retrieving accuracy greater than λ/400 and λ/200 (RMS value), respectively. The spatial uniform phase shift errors and harmonics can be suppressed by this method, using only four phase shifting interferograms.
KeywordOptical Testing Phase Shifting Interferometry Phase Shift Error Harmonics
Subject Area天文镜面(材料、加工、检测)
WOS IDWOS:000317802300003
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Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.niaot.ac.cn/handle/114a32/736
Collection中国科学院南京天文光学技术研究所_期刊论文
大口径光学技术研究室_期刊论文
Recommended Citation
GB/T 7714
Bo Li,Lei Chen,Xu C,et al. The simultaneous suppression of phase shift error and harmonics in the phase shifting interferometry using carrier squeezing interferometry[J]. Optics Communications,2013,296(296):17–24.
APA Bo Li,Lei Chen,Xu C,&Jinpeng Li.(2013).The simultaneous suppression of phase shift error and harmonics in the phase shifting interferometry using carrier squeezing interferometry.Optics Communications,296(296),17–24.
MLA Bo Li,et al."The simultaneous suppression of phase shift error and harmonics in the phase shifting interferometry using carrier squeezing interferometry".Optics Communications 296.296(2013):17–24.
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