| Metrology system for the calibration of multi-dof precision mechanisms | |
Lorenzo Zago; Mirsad Sarajlic; Fabien Chevalley; Dehua Yang
| |
| 2012-09-13 | |
| 会议录名称 | Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II |
| 卷号 | 8450 |
| 期号 | 8450 |
| 页码 | Vol.8450 39-1-10 |
| 会议日期 | 2012-7-1 |
| 会议地点 | Amsterdam, Netherlands |
| 会议主办者 | The International Society for Optical Engineering |
| 出版者 | SPIE |
| 摘要 |
We have developed a novel metrology system for precision XY measurements based on a concept developed originally in an industrial vision context by which USB cameras observe a target with a special dots pattern. The system has then been extended to Rx-Ry (tip-tilt), Z and Rz measurements by adding more cameras within a suitable configuration. The basic principle is described, first validated on a preliminary experimental implementation used for testing a new type of hexapod. We then illustrate the setup designed as calibration bench for hexapods used as positioning devices of the
secondary mirrors of astronomical telescopes. While work is still ongoing for improving this new metrology system, currently achieved performances are a stability of is ≤1 μm along linear degrees of freedom, respectively 0.5 arcsec for tip-tilt; absolute accuracy over ranges of a few millimeters is 5-10 μm , respectively arcsec; incremental accuracy is 2-3
μm, respectively 5 arcsec. |
| 关键词 | Multi-degree-of-freedom Metrology Hexapod Calibration. |
| 学科领域 | 天文技术与方法 |
| 文献类型 | 会议论文 |
| 条目标识符 | http://ir.niaot.ac.cn/handle/114a32/666 |
| 专题 | 会议论文 |
| 推荐引用方式 GB/T 7714 | Lorenzo Zago,Mirsad Sarajlic,Fabien Chevalley,et al. Metrology system for the calibration of multi-dof precision mechanisms[C]:SPIE,2012:Vol.8450 39-1-10. |
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