Metrology system for the calibration of multi-dof precision mechanisms | |
Lorenzo Zago; Mirsad Sarajlic; Fabien Chevalley; Dehua Yang![]() | |
2012-09-13 | |
Source Publication | Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II |
Volume | 8450 |
Issue | 8450 |
Pages | Vol.8450 39-1-10 |
Conference Date | 2012-7-1 |
Conference Place | Amsterdam, Netherlands |
Funding Organization | The International Society for Optical Engineering |
Publisher | SPIE |
Abstract |
We have developed a novel metrology system for precision XY measurements based on a concept developed originally in an industrial vision context by which USB cameras observe a target with a special dots pattern. The system has then been extended to Rx-Ry (tip-tilt), Z and Rz measurements by adding more cameras within a suitable configuration. The basic principle is described, first validated on a preliminary experimental implementation used for testing a new type of hexapod. We then illustrate the setup designed as calibration bench for hexapods used as positioning devices of the
secondary mirrors of astronomical telescopes. While work is still ongoing for improving this new metrology system, currently achieved performances are a stability of is ≤1 μm along linear degrees of freedom, respectively 0.5 arcsec for tip-tilt; absolute accuracy over ranges of a few millimeters is 5-10 μm , respectively arcsec; incremental accuracy is 2-3
μm, respectively 5 arcsec. |
Keyword | Multi-degree-of-freedom Metrology Hexapod Calibration. |
Subject Area | 天文技术与方法 |
Document Type | 会议论文 |
Identifier | http://ir.niaot.ac.cn/handle/114a32/666 |
Collection | 会议论文 |
Recommended Citation GB/T 7714 | Lorenzo Zago,Mirsad Sarajlic,Fabien Chevalley,et al. Metrology system for the calibration of multi-dof precision mechanisms[C]:SPIE,2012:Vol.8450 39-1-10. |
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