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Metrology system for the calibration of multi-dof precision mechanisms
Lorenzo Zago; Mirsad Sarajlic; Fabien Chevalley; Dehua Yang
2012-09-13
Source PublicationModern Technologies in Space- and Ground-based Telescopes and Instrumentation II
Volume8450
Issue8450
PagesVol.8450 39-1-10
Conference Date2012-7-1
Conference PlaceAmsterdam, Netherlands
Funding OrganizationThe International Society for Optical Engineering
PublisherSPIE
Abstract
We have developed a novel metrology system for precision XY measurements based on a concept developed originally in an industrial vision context by which USB cameras observe a target with a special dots pattern. The system has then been extended to Rx-Ry (tip-tilt), Z and Rz measurements by adding more cameras within a suitable configuration. The basic principle is described, first validated on a preliminary experimental implementation used for testing a new type of hexapod. We then illustrate the setup designed as calibration bench for hexapods used as positioning devices of the
secondary mirrors of astronomical telescopes. While work is still ongoing for improving this new metrology system, currently achieved performances are a stability of is ≤1 μm along linear degrees of freedom, respectively 0.5 arcsec for tip-tilt; absolute accuracy over ranges of a few millimeters is 5-10 μm , respectively arcsec; incremental accuracy is 2-3
μm, respectively 5 arcsec.
KeywordMulti-degree-of-freedom Metrology Hexapod Calibration.
Subject Area天文技术与方法
Document Type会议论文
Identifierhttp://ir.niaot.ac.cn/handle/114a32/666
Collection中国科学院南京天文光学技术研究所_会议论文
望远镜新技术研究室_会议论文
Recommended Citation
GB/T 7714
Lorenzo Zago,Mirsad Sarajlic,Fabien Chevalley,et al. Metrology system for the calibration of multi-dof precision mechanisms[C]:SPIE,2012:Vol.8450 39-1-10.
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