| Pilot Study for Ion Beam Figuring Process | |
GUO Weiyuan ; ZHENG Yi; WANG Hai; LIANG Bin
| |
| 2010-10-06 | |
| 会议录名称 | Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies |
| 卷号 | 7655 |
| 期号 | 7655 |
| 页码 | Vol.7655 0N-1-4 |
| 会议日期 | 2010-4-26 |
| 会议地点 | Dalian, China |
| 会议主办者 | The International Society for Optical Engineering |
| 出版者 | SPIE |
| 摘要 |
The ion beam figuring is a kind of advanced technology of mirror processing. It has the advantages of high processing precision, high speed and no damage to the mirror surface. The ion beam figuring machine is established by using a one meter diameter vacuum coating plant in this research project. Mechanical scanning device, ion source and workpiece make up of the machine. Water, electricity and gas will be imported to the vacuum chamber. The computer software, extracting the error function between the ion beam processing function and mirror surface function by using the data of interferometer measuring, will calculate the dwell-time function in the course of processing. The computer will control the whole process based on the dwell-time function. The experiment processing indicates that PV will reach 1/14λ and RMS will reach 1/70λ by once ion beam figuring. |
| 关键词 | Precision Optical Processing Ion Beam Figuring Ion Beam Figuring Processing Study For Ion Beam Figuring Process |
| 学科领域 | 天文镜面（材料、加工、检测） |
| 文献类型 | 会议论文 |
| 条目标识符 | http://ir.niaot.ac.cn/handle/114a32/592 |
| 专题 | 会议论文 |
| 推荐引用方式 GB/T 7714 | GUO Weiyuan,ZHENG Yi,WANG Hai,et al. Pilot Study for Ion Beam Figuring Process[C]:SPIE,2010:Vol.7655 0N-1-4. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Pilot study for ion （421KB） | 开放获取 | CC BY-NC-ND | 浏览 下载 | |||
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