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Pilot Study for Ion Beam Figuring Process
GUO Weiyuan; ZHENG Yi; WANG Hai; LIANG Bin
Source PublicationAdvanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
PagesVol.7655 0N-1-4
Conference Date2010-4-26
Conference PlaceDalian, China
Funding OrganizationThe International Society for Optical Engineering
The ion beam figuring is a kind of advanced technology of mirror processing. It has the advantages of high processing precision, high speed and no damage to the mirror surface. The ion beam figuring machine is established by using a one meter diameter vacuum coating plant in this research project. Mechanical scanning device, ion source and workpiece make up of the machine. Water, electricity and gas will be imported to the vacuum chamber. The computer software, extracting the error function between the ion beam processing function and mirror surface function by using the data of interferometer measuring, will calculate the dwell-time function in the course of processing. The computer will control the whole process based on the dwell-time function. The experiment processing indicates that PV will reach 1/14λ and RMS will reach 1/70λ by once ion beam figuring.
KeywordPrecision Optical Processing Ion Beam Figuring Ion Beam Figuring Processing Study For Ion Beam Figuring Process
Subject Area天文镜面(材料、加工、检测)
Document Type会议论文
Recommended Citation
GB/T 7714
GUO Weiyuan,ZHENG Yi,WANG Hai,et al. Pilot Study for Ion Beam Figuring Process[C]:SPIE,2010:Vol.7655 0N-1-4.
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