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Large sputtering coating plant working with a mode of scan
Weiyuan Guo
Source PublicationOptomechanical Technologies for Astronomy
PagesVol.6273 2P-1-9
Conference Date2006-5-24
Conference PlaceOrlando, FL
Funding OrganizationThe International Society for Optical Engineering
Introduction to design thought of a large vacuum sputtering coating plant for astronomical telescope .The coating plant is square and all working cells are installed on a holder inside the chamber. When the plant door open, the holder with working cells is hauled out of chamber, then maintaining, repair and installing mirrors are very easy. Metal film and dielectric film are made with DC and RF magnetron sputtering respectively. The largest diameter of mirror is 1600 mm and the diameter of sputtering target is 160 mm.

The whole mirror is coated by the polar coordinate scanning through computer control. There are three advantage: large mirror is sputtered with small power supply, so the cost is saved; By computer controlling working parameter of scanning, better uniformity can achieve; scanning sputtering can correct the mirror surface.
KeywordFilm Technics Coating Plant Magnetron Sputtering
Subject Area天文技术与方法
Document Type会议论文
Recommended Citation
GB/T 7714
Weiyuan Guo. Large sputtering coating plant working with a mode of scan[C]:SPIE,2006:Vol.6273 2P-1-9.
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