NIAOT OpenIR  > 会议论文
Large sputtering coating plant working with a mode of scan
Weiyuan Guo
2006-07-06
会议录名称Optomechanical Technologies for Astronomy
卷号6273
期号6273
页码Vol.6273 2P-1-9
会议日期2006-5-24
会议地点Orlando, FL
会议主办者The International Society for Optical Engineering
出版者SPIE
摘要
Introduction to design thought of a large vacuum sputtering coating plant for astronomical telescope .The coating plant is square and all working cells are installed on a holder inside the chamber. When the plant door open, the holder with working cells is hauled out of chamber, then maintaining, repair and installing mirrors are very easy. Metal film and dielectric film are made with DC and RF magnetron sputtering respectively. The largest diameter of mirror is 1600 mm and the diameter of sputtering target is 160 mm.

The whole mirror is coated by the polar coordinate scanning through computer control. There are three advantage: large mirror is sputtered with small power supply, so the cost is saved; By computer controlling working parameter of scanning, better uniformity can achieve; scanning sputtering can correct the mirror surface.
关键词Film Technics Coating Plant Magnetron Sputtering
学科领域天文技术与方法
文献类型会议论文
条目标识符http://ir.niaot.ac.cn/handle/114a32/443
专题会议论文
推荐引用方式
GB/T 7714
Weiyuan Guo. Large sputtering coating plant working with a mode of scan[C]:SPIE,2006:Vol.6273 2P-1-9.
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Large sputtering coa(440KB) 开放获取CC BY-NC-ND浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Weiyuan Guo]的文章
百度学术
百度学术中相似的文章
[Weiyuan Guo]的文章
必应学术
必应学术中相似的文章
[Weiyuan Guo]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Large sputtering coating plant working with a mode of scan.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。