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用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法(授权发明)
王晋峰; 黄猛; 田杰; 王烨儒
2018-02-12
Date Available2020-01-21
Country中国
Subtype发明
Other Abstract⑴.待改性的碳化硅平面镜,首先采用传统抛光方法或CCOS数控加工方法,利用金刚石微粉对非球面碳化硅反射镜进行研磨和粗抛光;⑵.当碳化硅反射镜面形精度符合改性要求后,利用长条形磁控溅射源在碳化硅镜面表面沉积一层致密的Si改性层;⑶.再利用圆形溅射源对反射镜面形加以修正和改进;⑷.最后对改性层进行精抛光,达到反射镜面形与粗糙度加工要求。本发明解决了碳化硅镜面加工中对改性层厚度把控不适宜而出现的返工问题。本发明方法制作的碳化硅光学镜面,粗糙度可达0.2~0.5nm,用时可缩短至1.5‑3个月。本发明工艺简单,加工效率和质量明显提高。
Subject Area天文技术与方法
Copyright Date2020-01-21
Patent NumberZL201810144019.1
Language中文
Status授权
Document Type专利
Identifierhttp://ir.niaot.ac.cn/handle/114a32/1741
Collection专利
Affiliation南京天文光学技术研究所
Recommended Citation
GB/T 7714
王晋峰,黄猛,田杰,等. 用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法(授权发明). ZL201810144019.1[P]. 2018-02-12.
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