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离轴非球面零位补偿检验的非线性畸变校正
厉宏兰1,2,3; 袁吕军1,2; 徐节速1,2,3; 李倩1,2,3; 康燕1,2
2019-07
Source Publication应用光学
Volume40Issue:4Pages:638-644
Abstract
在大口径、快焦比非球面的补偿检验中,入射光线在短距离内发生大角度急剧折转,导致干涉仪面形检验结果图像产生非线性畸变,严重影响了数控小磨盘抛光的位置精度和误差去除效率。为了校正离轴非球面在补偿检验中产生的图像畸变,提出了一种校正非线性畸变图像的方法,通过同心环带法确定畸变中心位置并利用光线追迹建立被检镜到干涉图的映射关系。针对某一光学系统的520mm×250mm的离轴抛物面主镜进行了畸变图像的校正,校正结果面形与工件面形的位置偏差降到1mm以下,满足小磨盘抛光的工作要求。
Keyword畸变校正 非线性光学 光线追迹 离轴非球面 零位补偿检验
Subject Area天文技术与方法
Document Type期刊论文
Identifierhttp://ir.niaot.ac.cn/handle/114a32/1651
Collection期刊论文
Affiliation1.南京天文光学技术研究所
2.天文光学技术重点实验室
3.中国科学院大学
Recommended Citation
GB/T 7714
厉宏兰,袁吕军,徐节速,等. 离轴非球面零位补偿检验的非线性畸变校正[J]. 应用光学,2019,40(4):638-644.
APA 厉宏兰,袁吕军,徐节速,李倩,&康燕.(2019).离轴非球面零位补偿检验的非线性畸变校正.应用光学,40(4),638-644.
MLA 厉宏兰,et al."离轴非球面零位补偿检验的非线性畸变校正".应用光学 40.4(2019):638-644.
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